Melemo le bohlokoa ba filimi e tšesaane ea lithium niobate ho theknoloji e kopaneng ea microwave photon
Theknoloji ea microwave ea photone na le melemo ea bandwidth e kholo ea ts'ebetso, bokhoni bo matla ba ho sebetsa ka parallel le tahlehelo e tlase ea phetisetso, e nang le monyetla oa ho senya botlolo ea tekheniki ea sistimi ea microwave ea setso le ho ntlafatsa ts'ebetso ea lisebelisoa tsa tlhahisoleseling tsa sesole tse kang radar, ntoa ea elektroniki, puisano le tekanyo le taolo.Leha ho le joalo, tsamaiso ea microwave photon e thehiloeng ho lisebelisoa tse sa tloaelehang e na le mathata a mang a kang molumo o moholo, boima bo boima le botsitso bo fokolang, tse thibelang ka botebo ho sebelisoa ha theknoloji ea microwave photon sethaleng sa spaceborne le airborne.Ka hona, theknoloji e kopantsoeng ea microwave photon e fetoha ts'ehetso ea bohlokoa ho senya ts'ebeliso ea microwave photon tsamaisong ea tlhahisoleseding ea elektroniki ea sesole le ho fana ka papali e feletseng ho melemo ea theknoloji ea microwave photon.
Hona joale, theknoloji ea ho kopanya photonic e thehiloeng ho SI-based le theknoloji ea ho kopanya photonic e thehiloeng ho INP e ntse e hōla le ho feta ka mor'a lilemo tse ngata tsa tsoelo-pele lefapheng la puisano ea optical, 'me lihlahisoa tse ngata li kentsoe' marakeng.Leha ho le joalo, bakeng sa ts'ebeliso ea microwave photon, ho na le mathata mefuteng ena e 'meli ea theknoloji ea ho kopanya photon: mohlala, "nonlinear electro-optical coefficient" ea Si modulator le InP modulator e khahlanong le linearity e phahameng le litšoaneleho tse kholo tsa matla tse lateloang ke microwave. theknoloji ea photon;Ka mohlala, silicon optical switch e hlokomelang ho fetoha ha tsela ea optical, ebang e thehiloe ho thermal-optical effect, piezoelectric effect, kapa carrier injection dispersion effect, e na le mathata a ho lieha ho fetoha ka potlako, tšebeliso ea matla le tšebeliso ea mocheso, e ke keng ea kopana le lebelo le potlakileng. ho hlahlojoa ha beam le lisebelisoa tse kholo tsa microwave photon.
Lithium niobate esale e le khetho ea pele bakeng sa lebelo le phahamengelectro-optic modulationthepa ka lebaka la eona e babatsehang linear electro-optic effect.Leha ho le joalo, setso sa lithium niobatemotlakase oa motlakasee entsoe ka thepa e kholo ea kristale ea lithium niobate, 'me boholo ba sesebelisoa bo boholo haholo, bo ke keng ba finyella litlhoko tsa theknoloji e kopantsoeng ea microwave photon.Mokhoa oa ho kopanya lisebelisoa tsa lithium niobate le linear electro-optical coefficient ho sistimi e kopaneng ea microwave photon e fetohile sepheo sa bafuputsi ba amehang.Ka 2018, sehlopha sa lipatlisiso se tsoang Univesithing ea Harvard ea United States se ile sa tlaleha ka lekhetlo la pele theknoloji ea ho kopanya photonic e thehiloeng filiming e tšesaane ea lithium niobate ka Nature, hobane theknoloji e na le melemo ea ho kopanya ho phahameng, motlakase o moholo oa electro-optical modulation, le linearity e phahameng ea motlakase. -optical effect, hang ha e qalisoa, hang-hang e ile ea baka tlhokomelo ea thuto le indasteri tšimong ea ho kopanya photonic le microwave photonics.Ho latela pono ea tšebeliso ea microwave photon, pampiri ena e hlahloba tšusumetso le bohlokoa ba theknoloji ea ho kopanya photon e thehiloeng filiming e tšesaane ea lithium niobate mabapi le nts'etsopele ea theknoloji ea microwave photon.
Filimi e tšesaane ea lithium niobate le filimi e tšesaanelithium niobate modulator
Lilemong tse peli tsa morao tjena, ho hlahile mofuta o mocha oa lisebelisoa tsa lithium niobate, ke hore, filimi ea lithium niobate e tlosoa kristale e kholo ea lithium niobate ka mokhoa oa "ion slicing" 'me e tlamahane le Si wafer e nang le silika buffer lera ho. sebopeho LNOI (LiNbO3-On-Insulator) lintho tse bonahalang [5], eo ho thoeng tšesaane filimi lithium niobate lintho tse bonahalang pampiring ena.Li-waveguide tsa Ridge tse bolelele ba li-nanometer tse fetang 100 li ka kenngoa filiming e tšesaane ea lithium niobate ka ts'ebetso e ntlafalitsoeng ea etching, 'me phapang e sebetsang ea refractive index ea waveguides e thehiloeng e ka fihla ho feta 0.8 (e phahame haholo ho feta phapang ea index ea setso ea setso. lithium niobate waveguides tsa 0.02), joalokaha ho bontšoa ho Setšoantšo sa 1. Leqhubu le thibetsoeng ka matla le etsa hore ho be bonolo ho bapisa tšimo e khanyang le tšimo ea microwave ha ho etsoa modulator.Ka hona, ho molemo ho fihlella motlakase o tlase oa halofo ea maqhubu le bandwidth e kholo ea modulation ka bolelele bo khuts'oane.
Ponahalo ea tahlehelo e tlase ea lithium niobate submicron waveguide e roba botlolo ea motlakase o phahameng oa motlakase oa setso sa lithium niobate electro-optic modulator.Sebaka sa li-electrode se ka fokotsoa ho ~ 5 μm, 'me ho kopana pakeng tsa tšimo ea motlakase le tšimo ea optical mode ho eketseha haholo,' me vπ · L e fokotseha ho tloha ho feta 20 V · cm ho ea ho 2,8 V · cm.Ka hona, tlas'a motlakase o tšoanang oa halofo ea maqhubu, bolelele ba sesebelisoa bo ka fokotsoa haholo ha bo bapisoa le modulator ea setso.Ka nako e ts'oanang, ka mor'a ho ntlafatsa litekanyetso tsa bophara, botenya le nako ea motlakase oa maqhubu a tsamaeang, joalokaha ho bontšitsoe setšoantšong, modulator e ka ba le bokhoni ba ho sebelisa li-bandwidth tse phahameng ho feta 100 GHz.
Fig.1 (a) kabo ea mokhoa o baloang le (b) setšoantšo sa karolo e ka holimo ea LN waveguide
Setšoantšo sa 2 (a) Sebopeho sa Waveguide le electrode le (b) coreplate ea LN modulator
Papiso ea lifilimi tse tšesaane tsa lithium niobate modulators le li-modulator tsa khoebo tsa lithium niobate tsa setso, li-modulator tse thehiloeng ho silicon le indium phosphide (InP) le li-modulator tse ling tse teng ka lebelo le phahameng la motlakase, likarolo tsa mantlha tsa papiso li kenyelletsa:
(1) Sehlahisoa sa halofo ea maqhubu a volt-length (vπ ·L, V·cm), se lekanya bokhoni ba ho feto-fetoha ha modulator, ha boleng bo le bonyenyane, bo phahamisa katleho ea modulator;
(2) 3 dB modulation bandwidth (GHz), e lekanyang karabelo ea modulator ho feto-fetoha ha maqhubu a phahameng;
(3) Tahlehelo ea ho kenya mahlo (dB) sebakeng sa modulation.E ka bonoa tafoleng hore filimi e tšesaane ea lithium niobate modulator e na le melemo e totobetseng ho modulation bandwidth, half-wave voltage, optical interpolation loss joalo-joalo.
Silicon, e le lejoe la sekhutlo la li-optoelectronics tse kopantsoeng, li 'nile tsa ntlafatsoa ho fihlela joale, ts'ebetso e se e hōlile, miniaturization ea eona e loketse ho kopanngoa ka bongata ba lisebelisoa tse sebetsang / tse sa sebetseng,' me modulator ea eona e 'nile ea ithutoa ka mokhoa o pharaletseng le ka botebo tšimong ea optical. puisano.Mochine oa electro-optical modulation oa silicon ke haholo-holo oa ho theola li-carrier, ente ea mopalami le ho bokellana ha mojari.Har'a bona, bandwidth ea modulator e nepahetse ka mokhoa o nepahetseng oa ho fokotsa tekanyo ea mochine, empa hobane optical field distribution e kopana le ho se ts'oane ha sebaka sa ho fokotseha, phello ena e tla hlahisa ho sotha ha taelo ea bobeli e sa tsitsang le ho kheloha ha tatellano ea boraro. mantsoe, hammoho le phello ea ho monya ha mokhanni khanyeng, e leng ho tla lebisa ho fokotseheng ha amplitude ea optical modulation le ho sotha pontšo.
Modulator ea InP e na le litlamorao tse ikhethang tsa elektro-optical, 'me sebopeho sa seliba sa multilayer quantum se ka lemoha lebelo le phahameng haholo le li-modulator tse tlase tsa ho khanna ka Vπ · L ho fihla ho 0.156V · mm.Leha ho le joalo, phapang ea index ea refractive e nang le motlakase e kenyelletsa mantsoe a tloaelehileng le a sa tloaelehang, 'me ho eketseha ha matla a motlakase ho tla etsa hore phello ea bobeli e hlahelle.Ka hona, li-modulator tsa silicon le InP electro-optic li hloka ho sebelisa leeme ho theha pn junction ha li sebetsa, 'me pn junction e tla tlisa tahlehelo ea ho monya leseli.Leha ho le joalo, boholo ba modulator ea tsena tse peli bo nyane, boholo ba modulator ea InP ea khoebo ke 1/4 ea LN modulator.Ho sebetsa ka mokhoa o phahameng oa ho feto-fetoha ha maemo, ho loketse bakeng sa marang-rang a phahameng a phahameng le a makhutšoane a ho fetisa marang-rang a digital optical transmission joalo ka litsi tsa data.Elektro-optical effect ea lithium niobate ha e na mokhoa oa ho monya leseli le tahlehelo e tlase, e loketseng sebaka se selelele se hokahaneng.puisano ea mahloka matla a maholo le lebelo le phahameng.Ts'ebetsong ea microwave photon, li-coefficients tsa electro-optical tsa Si le InP ha li na moeli, tse sa lokelang tsamaiso ea microwave photon e phehellang linearity e phahameng le matla a maholo.Thepa ea lithium niobate e loketse haholo ts'ebeliso ea microwave photon ka lebaka la coefficient ea eona ea ho feto-fetoha ha motlakase ka ho feletseng.
Nako ea poso: Apr-22-2024