E 'ngoe ea thepa ea bohlokoa ka ho fetisisa ea mochine oa optical ke lebelo la eona la ho feto-fetoha kapa bandwidth, e lokelang ho ba bonyane ka potlako joaloka lisebelisoa tsa elektronike tse teng.Li-transistors tse nang le maqhubu a lipalangoang hantle ka holimo ho 100 GHz li se li bontšitsoe ka theknoloji ea silicon ea 90 nm, 'me lebelo le tla eketseha le ho feta ha boholo ba likarolo bo fokotseha [1].Leha ho le joalo, bandwidth ea li-modulator tsa mehleng ea kajeno tse thehiloeng ho silicon e lekanyelitsoe.Silicon ha e na χ(2) -nonlinearity ka lebaka la sebopeho sa eona sa centro-symmetric crystalline.Tšebeliso ea silicon e tsitsitsoeng e entse hore ho be le liphello tse thahasellisang tse seng li ntse li le teng [2], empa li-nonlinearities ha li e-s'o lumelle lisebelisoa tse sebetsang.Ka hona, li-modulator tsa silicon photonic tsa boemo bo holimo li ntse li itšetlehile ka ho hasana ha thepa ea mahala ho pn kapa pin junctions [3-5].Li-junctions tsa pele li bonts'itsoe ho bonts'a sehlahisoa sa bolelele ba motlakase se tlase joalo ka VπL = 0.36 V mm, empa lebelo la ho feto-fetoha le lekanyelitsoe ke matla a bajari ba fokolang.Leha ho le joalo, litefiso tsa data tsa 10 Gbit / s li entsoe ka thuso ea ho hatisoa pele ho pontšo ea motlakase [4].Ho sebelisa li-junctions tse fapaneng ho fapana le hoo, bandwidth e eketsehile ho fihla ho 30 GHz [5,6], empa sehlahisoa sa voltagelength se nyolohetse ho VπL = 40 V mm.Ka bomalimabe, li-modulator tse joalo tsa plasma effect li hlahisa ho feto-fetoha ha matla ho sa batleheng [7], 'me ba arabela ka tsela e sa tsitsang ho motlakase o sebelisitsoeng.Mefuta e tsoetseng pele ea ho feto-fetoha ha maemo joaloka QAM e hloka, leha ho le joalo, karabelo e lekanang le ho feto-fetoha ha karolo e hloekileng, ho etsa hore tšebeliso ea phello ea electro-optic (Pockels effect [8]) e lakatsehe ka ho khetheha.
2. SOH katamelo
Haufinyane tjena, mokhoa oa silicon-organic hybrid (SOH) o khothalelitsoe [9-12].Mohlala oa modulator oa SOH o bontšoa setšoantšong sa 1 (a).E na le slot waveguide e tataisang lebala la optical, le likhoele tse peli tsa silicon tse hokahanyang motlakase oa optical waveguide ho li-electrode tsa tšepe.Li-electrode li fumaneha ka ntle ho sebaka sa optical modal ho qoba tahlehelo ea optical [13], Setšoantšo sa 1 (b).Sesebediswa sena se koahetsoe ka lintho tse entsoeng ka elektro-optic tse tlatsang sekotjana ka mokhoa o ts'oanang.Voltage ea modulating e tsamaisoa ke waveguide ea motlakase ea tšepe ebe e theoha ka har'a slot ka lebaka la likhoele tsa silicon tse tsamaisang.Sebaka sa motlakase se hlahisoang se fetola index ea refraction ho slot ka phello ea electro-optic e potlakileng haholo.Kaha sekotjana se na le bophara ka tatellano ea 100 nm, li-volts tse 'maloa li lekane ho hlahisa masimo a matla haholo a modulating a leng ka tatellano ea boholo ba matla a dielectric a lisebelisoa tse ngata.Sebopeho se na le ts'ebetso e phahameng ea ho feto-fetoha ha maemo ho tloha ha masimo a modulating le a optical a tsepamisitsoe ka hare ho slot, Setšoantšo sa 1 (b) [14].Ka 'nete, ts'ebetsong ea pele ea li-modulators tsa SOH tse nang le ts'ebetso ea sub-volt [11] e se e bontšitsoe,' me ho feto-fetoha ha sinusoidal ho fihlela 40 GHz ho bontšitsoe [15,16].Leha ho le joalo, phephetso ea ho aha li-modulator tsa SOH tsa lebelo le tlase ke ho theha khoele e hokahantsoeng haholo.Ka potoloho e lekanang slot e ka emeloa ke capacitor C le lihlopha tsa conductive ka resistors R, Setšoantšo sa 1 (b).Nako ea nako ea RC e lumellanang e etsa qeto ea bandwidth ea sesebelisoa [10,14,17,18].E le ho fokotsa khanyetso ea R, ho 'nile ha etsoa tlhahiso ea ho theola marapo a silicon [10,14].Le hoja doping e eketsa conductivity ea likhahla tsa silicon ('me kahoo e eketsa tahlehelo ea optical), motho o lefa kotlo e eketsehileng ea tahlehelo hobane ho tsamaea ha elektronike ho senyeha ka ho hasana ho se hloeke [10,14,19].Ho feta moo, liteko tsa morao-rao tse entsoeng ka maiketsetso li bontšitse conductivity e tlaase e sa lebelloang.
Beijing Rofea Optoelectronics Co., Ltd. e fumanehang "Silicon Valley" ea China - Beijing Zhongguancun, ke khoebo ea theknoloji e phahameng e ikemiselitseng ho sebeletsa litsi tsa lipatlisiso tsa malapeng le tsa kantle ho naha, litsi tsa lipatlisiso, liunivesithi le basebetsi ba likhoebo tsa lipatlisiso tsa mahlale.Khamphani ea rona e ikakhetse ka setotsoana lipatlisisong tse ikemetseng le nts'etsopele, moralo, tlhahiso, thekiso ea lihlahisoa tsa optoelectronic, 'me e fana ka litharollo tse ncha le lits'ebeletso tse ikhethileng bakeng sa bafuputsi ba mahlale le baenjiniere ba indasteri.Ka mor'a lilemo tse ngata tsa boipheliso bo ikemetseng, e thehile letoto le ruileng le le phethahetseng la lihlahisoa tsa photoelectric, tse sebelisoang haholo ho masepala, sesole, lipalangoang, matla a motlakase, lichelete, thuto, bongaka le liindasteri tse ling.
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Nako ea poso: Mar-29-2023