Photonic integrated circuit (PIC) tsamaiso ea lintho tse bonahalang

Photonic integrated circuit (PIC) tsamaiso ea lintho tse bonahalang

Silicon photonics ke taeo e sebelisang meaho ea moralo e thehiloeng ho lisebelisoa tsa silicon ho tsamaisa leseli ho fihlela mesebetsi e fapaneng. Mona re shebana le ts'ebeliso ea silicon photonics ho theheng li-transmitters le li-receiver bakeng sa likhokahano tsa fiber optic. Ha tlhokahalo ea ho eketsa phetisetso e eketsehileng ho bandwidth e fanoeng, sebaka se fanoeng, le litšenyehelo tse fanoeng li ntse li eketseha, silicon photonics e ba le moruo o motle haholoanyane. Bakeng sa karolo ea optical,theknoloji ea ho kopanya photonicli tlameha ho sebelisoa, 'me li-transceiver tse ngata tse lumellanang kajeno li hahiloe ho sebelisoa LiNbO3 / planar light-wave circuit (PLC) modulator le ba amohelang InP/PLC.

Setšoantšo sa 1: E bonts'a lisebelisoa tse sebelisoang hangata tsa photonic integrated circuit (PIC).

Setšoantšo sa 1 se bonts'a lisebelisoa tse tsebahalang haholo tsa PIC. Ho tloha ka ho le letšehali ho ea ho le letona ke silicon-based silica PIC (eo hape e tsejoang e le PLC), silicon-based insulator PIC (silicon photonics), lithium niobate (LiNbO3), le III-V sehlopha sa PIC, tse kang InP le GaAs. Pampiri ena e shebane le li-photonics tse thehiloeng ho silicon. Holitšoantšo tsa silicon, lets'oao la leseli haholo-holo le tsamaea ka silicon, e nang le lekhalo le sa tobang la li-electron volts tse 1.12 (ka bolelele ba li-micron tse 1,1). Silicon e lengoa ka mokhoa oa likristale tse hloekileng ka har'a libopi ebe e khaola likotoana, tseo kajeno li leng bophara ba 300 mm. Bokaholimo bo entsoe ka oxidized ho etsa lera la silika. E 'ngoe ea li-wafer e hlaseloa ka liathomo tsa haedrojene ho ea botebong bo itseng. Li-wafers tse peli li kopanngoa ka har'a vacuum 'me likarolo tsa tsona tsa oxide li tlamahane. Kopano e robeha ho latela mohala oa hydrogen ion implantation. Lera la silicon le petsong lea bentšitsoe, qetellong le siea lesela le tšesaane la kristale Si ka holim'a lesela le sa sebetseng la "handle" la silicon holim'a lera la silika. Li-waveguides li entsoe ka lera lena le tšesaane la kristale. Le ha li-wafers tsena tse thehiloeng ho silicon-based insulator (SOI) li etsa hore li-waveguide tsa silicon photonics tsa tahlehelo e tlase li khonehe, ha e le hantle li sebelisoa hangata lipotolohong tsa CMOS tse nang le matla a tlase ka lebaka la ho lutla ho tlase ha hona joale tseo li fanang ka tsona.

Ho na le mefuta e mengata e ka khonehang ea silicon-based optical waveguides, joalokaha ho bontšitsoe setšoantšong sa 2. Li tloha ho microscale germanium-doped silica waveguides ho nanoscale Silicon Wire waveguides. Ka ho kopanya germanium, hoa khoneha ho etsali-photodetectorsle ho monya motlakaseli-modulators, mme mohlomong le li-amplifiers tsa optical. Ka silicon ea doping, anoptical modulatore ka etsoa. Botlaaseng ho tloha ho le letšehali ho ea ho le letona ke: silicon wire waveguide, silicon nitride waveguide, silicon oxynitride waveguide, teteaneng ea silicon ridge waveguide, silicon nitride waveguide e tšesaane le doped silicon waveguide. Ka holimo, ho tloha ka ho le letšehali ho ea ho le letona, ho na le li-modulators tsa depletion, germanium photodetectors, le germanium.li-amplifiers tsa mahlo.

Setšoantšo sa 2: Karolo e fapaneng ea letoto la li-waveguide la silicon-based optical waveguide, le bonts'ang tahlehelo e tloaelehileng ea phatlalatso le li-indices tsa refractive.